公开(公告)号：EP2913664B1

公开(公告)日：2017-05-03

申请号：EP15157054

申请日：2015-02-27

Applicant: ARKRAY INC

Inventor： TANAKA TAKASHIGE ,  SHIRAKI YASUNORI

IPC: G01N21/67 ,  G01N21/71 ,  H05H1/46

CPC classification number: G01J3/443 ,  B23K10/006 ,  G01J3/12 ,  G01N21/67 ,  H05H1/46 ,  H05H1/48

Abstract: The present invention provides a chip for plasma generation, a plasma generator, and a plasma spectrometry method, having high reproducibility of plasma light emission without a requirement of a discharge unit for removing air bubbles. The chip for plasma generation of the present invention includes a channel, the channel has a first region, a narrow portion, and a second region, the narrow portion is in communication with the first region and the second region and has a cross-sectional area smaller than the first region and the second region, and the chip satisfies at least one of the following conditions (1) and (2): (1) at least one of the inner walls of the first region and the second region has a groove portion; and (2) the chip includes a cathode fixed on the inner wall of the first region.

Abstract translation: 本发明提供一种等离子体发生用芯片，等离子体发生器以及等离子体分光测定法，不需要用于除去气泡的排出部，等离子体发光的再现性高。 本发明的等离子体产生用芯片包括沟道，所述沟道具有第一区域，窄部分和第二区域，所述窄部分与所述第一区域和所述第二区域连通，并且所述沟道的横截面积 （1）和（2）中的至少一个：（1）第一区域和第二区域的内壁中的至少一个具有凹槽，该第一区域和第二区域中的至少一个具有凹槽 一部分; （2）芯片包括固定在第一区域的内壁上的阴极。