公开(公告)号：EP4083708A1

公开(公告)日：2022-11-02

申请号：EP21171130.4

申请日：2021-04-29

申请人： ASML Netherlands B.V.

发明人： KLUGKIST, Joost André ,  BOS, Koen, Martin, Willem Jan ,  ANAND, Anirudh

IPC分类号： G03F7/20 ,  G02B5/08

摘要： A mirror system (200), comprising a mirror (202) and a waveguide (206) comprising: an input (208) configured to receive a light beam (216) from a light source (214) and one or more light splitting elements (212A) configured to split the light beam into a plurality of beams and direct each of said beams to a respective one of a plurality of outputs (210A), each output arranged to direct the respective beam to a respective one of a plurality of areas (220A) of the mirror.