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1.发明公开SENSOR, OBJECT POSITIONING SYSTEM, LITHOGRAPHIC APPARATUS AND DEVICE DEVICE MANUFACTURING METHOD 有权传感器，物件定位系统，光刻装置及装置装置制造方法
公开(公告)号：EP3189377A1
公开(公告)日：2017-07-12
申请号：EP15736849.9
申请日：2015-07-20
发明人： AKKERMANS, Johannes, Antonius, Gerardus , BEERENS, Ruud, Antonius, Catharina, Maria , BROERS, Sander, Christiaan , DE BEST, Jeroen Johannes Theodorus Hendrikus , HEEREN, Adrianus, Marinus, Wouter , LEENKNEGT, George, Alois, Leonie , LENSSEN, Bo , SCHELLENS, Hendrikus, Johannes , VAN DER KRIEKEN, Peter , CADEE, Theodorus, Petrus, Maria , VAN EIJK, Jan , VAN LIESHOUT, Richard, Henricus, Adrianus
CPC分类号： G03F7/70775 , G01L1/16 , G01P15/0915 , G01P15/18 , G03F7/70716 , G03F7/70783 , G03F7/7085
摘要： A sensor includes two shear-mode piezoelectric transducers, wherein each piezoelectric transducer has a bottom surface and a top surface, wherein the top surfaces of the piezoelectric transducers are rigidly connected to each other, and wherein the bottom surfaces of the piezoelectric transducers are configured to be attached to an object to be measured.
摘要翻译： 本发明涉及包括两个剪切模式压电换能器（TR1，TR2）的传感器（SE），其中每个压电换能器包括底表面（BS）和顶表面（TS），其中压电换能器的顶表面是 刚性地彼此连接，并且其中底部表面被构造成附接到待测量的物体（OB）。
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2.发明授权SENSOR, OBJECT POSITIONING SYSTEM, LITHOGRAPHIC APPARATUS AND DEVICE DEVICE MANUFACTURING METHOD 有权传感器，物件定位系统，光刻装置及装置装置制造方法
公开(公告)号：EP3189377B1
公开(公告)日：2018-05-16
申请号：EP15736849.9
申请日：2015-07-20
发明人： AKKERMANS, Johannes, Antonius, Gerardus , BEERENS, Ruud, Antonius, Catharina, Maria , BROERS, Sander, Christiaan , DE BEST, Jeroen Johannes Theodorus Hendrikus , HEEREN, Adrianus, Marinus, Wouter , LEENKNEGT, George, Alois, Leonie , LENSSEN, Bo , SCHELLENS, Hendrikus, Johannes , VAN DER KRIEKEN, Peter , CADEE, Theodorus, Petrus, Maria , VAN EIJK, Jan , VAN LIESHOUT, Richard, Henricus, Adrianus
CPC分类号： G03F7/70775 , G01L1/16 , G01P15/0915 , G01P15/18 , G03F7/70716 , G03F7/70783 , G03F7/7085
摘要： A sensor includes two shear-mode piezoelectric transducers, wherein each piezoelectric transducer has a bottom surface and a top surface, wherein the top surfaces of the piezoelectric transducers are rigidly connected to each other, and wherein the bottom surfaces of the piezoelectric transducers are configured to be attached to an object to be measured.
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