公开(公告)号：EP3049869A1

公开(公告)日：2016-08-03

申请号：EP14758149.0

申请日：2014-09-02

申请人： ASML Netherlands B.V.

发明人： HOUBEN, Martijn ,  DE KOCK, Alwin ,  VAN ABEELEN, Hendrikus, Johannes, Marinus ,  VAN DEN HEUVEL, Marco, Adrianus, Peter

IPC分类号： G03F7/20

CPC分类号： G03F7/70716 ,  G03F7/707 ,  G03F7/70875 ,  H01L21/6875

摘要： A support table to support a surface of a substrate, wherein the support table includes: a base surface substantially parallel to the surface of the substrate, a plurality of burls protruding above the base surface, each of the burls having a respective distal end and a first height above the base surface, the burls arranged such that, when the substrate is supported by the support table, the substrate is supported by the respective distal ends, and a plurality of elongate raised protrusions separated by gaps, each of the elongate raised protrusions having a second height above the base surface, wherein the elongate raised protrusions protrude above the base surface between the burls, and the second height is less than the first height; wherein the protrusions are arranged such that a plurality of the gaps are aligned to form a straight gas flow path towards an edge of the base surface.

摘要翻译： 支承台，以支持一基材的表面上，worin所述支承台包括：基部表面基本上平行于基材的表面，基底表面的上方突出的突节的复数，每个突节的具有respectivement远端和 基底表面上方的第一高度，所述突节布置寻求的是，当基片由支撑台支撑，基板是由respectivement远端支撑，并且细长突起凸出的多元性由间隙隔开，每个细长的凸起突出 具有基表面上方的第二高度，worin提出的突节之间的基底表面的上方突出的突出细长的，并且所述第二高度小于所述第一高度; worin凸出布置搜索做了间隙的多元性对齐以形成朝向在基座表面的边缘的直线气体流路。

公开(公告)号：EP3049869B1

公开(公告)日：2017-11-08

申请号：EP14758149.0

申请日：2014-09-02

申请人： ASML Netherlands B.V.

发明人： HOUBEN, Martijn ,  DE KOCK, Alwin ,  VAN ABEELEN, Hendrikus, Johannes, Marinus ,  VAN DEN HEUVEL, Marco, Adrianus, Peter

IPC分类号： G03F7/20

CPC分类号： G03F7/70716 ,  G03F7/707 ,  G03F7/70875 ,  H01L21/6875

摘要： A support table to support a surface of a substrate, wherein the support table includes: a base surface substantially parallel to the surface of the substrate, a plurality of burls protruding above the base surface, each of the burls having a respective distal end and a first height above the base surface, the burls arranged such that, when the substrate is supported by the support table, the substrate is supported by the respective distal ends, and a plurality of elongate raised protrusions separated by gaps, each of the elongate raised protrusions having a second height above the base surface, wherein the elongate raised protrusions protrude above the base surface between the burls, and the second height is less than the first height; wherein the protrusions are arranged such that a plurality of the gaps are aligned to form a straight gas flow path towards an edge of the base surface.