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    OBJECT HOLDER, LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD, AND METHOD OF MANUFACTURING AN OBJECT HOLDER
    2.
    发明公开
    OBJECT HOLDER, LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD, AND METHOD OF MANUFACTURING AN OBJECT HOLDER 审中-公开
    物体保持器，光刻设备制造方法的装置和方法用于制造物体支架

    公开(公告)号：EP2979135A2

    公开(公告)日：2016-02-03

    申请号：EP14708521.1

    申请日：2014-02-26

    申请人： ASML Netherlands B.V.

    发明人： LAFARRE, Raymond ,  ACHANTA, Satish ,  FILIPPI, Matteo ,  KARADE, Yogesh ,  NELLISSEN, Antonius ,  VAN DER WILK, Ronald ,  VAN DOREMALEN, Hendrikus, Christoffel, Maria ,  WELTERS, Wilhelmus

    IPC分类号： G03F7/20

    CPC分类号： G03F7/70716 ,  G03F7/70708

    摘要： A method of manufacturing an object holder for use in a lithographic apparatus, the object holder including one or more electrically functional components, the method including: using a composite structure including a carrier sheet different from a main body of the object holder and a layered structure including one or a plurality of layers and formed on the carrier sheet; connecting the composite structure to a surface of the main body such that the layered structure is between the carrier sheet and the surface of the main body; and removing the carrier sheet from the composite structure, leaving the layered structure connected to the main body.

    摘要翻译： 制造对象保持器中的一种用于在光刻设备中使用的方法，所述对象保持器包括一个或多个电功能的部件，所述方法包括：使用复合结构，其包括载体片材从所述对象保持器的主体和层状结构的不同 包括一个或层上的多个和形成在载体片材上; 该复合结构连接到检查的主体的表面上未发现分层结构是所述载体片材和所述主体的所述表面之间; 及从该复合结构体的载体片材，留下连接到所述主体上的层状结构。