专利检索 ap:("ASML Netherlands B.V." OR "ASML Holding N.V.") AND inv:"ADAMS, Joshua" 第 1 页

1.

发明公开
APPARATUS AND METHOD FOR DETERMINING A CONDITION ASSOCIATED WITH A PELLICLE 审中-公开

公开(公告)号：EP3724721A1

公开(公告)日：2020-10-21

申请号：EP18811777.4

申请日：2018-11-27

申请人： ASML Netherlands B.V. , ASML Holding N.V.

发明人： BROUNS, Derk Servatius Gertruda , ADAMS, Joshua , BENDIKSEN, Aage , JACOBS, Richard , JUDGE, Andrew , KOTTAPALLI, Veera Venkata Narasimha Narendra Phani , LYONS, Joseph Harry , MODDERMAN, Theodorus Marinus , RANJAN, Manish , VAN DE KERKHOF, Marcus Adrianus , XIONG, Xugang

IPC分类号： G03F1/62 , G03F1/64 , G03F7/20