公开(公告)号：EP3332227A1

公开(公告)日：2018-06-13

申请号：EP16833674.1

申请日：2016-08-01

申请人： Aceinna, Inc.

发明人： ZHAO, Yang ,  SILPACHAI, Ohlan ,  MAN, Francis ,  ZHAO, Zhengxin

IPC分类号： G01F1/688 ,  G01F9/00 ,  G01N9/32 ,  H01C17/075 ,  H05B3/60

CPC分类号： G01F1/6847 ,  G01F1/6845 ,  G01F1/692

摘要： A MEMS flow sensor is provided having a micro flow channel etched in a silicon structure composed of two silicon substrates bonded or fused together. A heater and one or more temperature sensors are, in one embodiment, disposed around the perimeter of the flow channel and outside of the channel. In another embodiment, a heater and one or more temperature sensors are respectively disposed outside the flow channel at the top and bottom of the channel. In further embodiments, a heater and one or more temperature sensors are located inside the flow channel on one or more surfaces thereof or around the inside perimeter of the channel. The flow sensors in accordance with the invention are preferably fabricated using wafer scale fabrication techniques.