-
公开(公告)号：EP2346083B1
公开(公告)日：2016-03-30
申请号：EP09814664.0
申请日：2009-09-18
IPC分类号： H01L29/84 , G01P15/08 , G01P15/125 , G01P1/02 , B81B7/00
CPC分类号： G01P15/125 , B81B7/007 , B81B2203/0307 , B81B2207/07 , B81B2207/097 , B81C2203/036 , G01P1/023 , G01P15/0802 , G01P2015/0814 , H01L21/84 , H01L27/1203
-
公开(公告)号：EP3444710A1
公开(公告)日：2019-02-20
申请号：EP17782128.7
申请日：2017-02-23
IPC分类号： G06F3/041
摘要： [Object] In a sensor unit in which a flexible wiring board is joined to a sensor base material, to provide a sensor unit that can prevent bubbles at an edge of the flexible wiring board from affecting a display region and can increase a strength with which the sensor base material and flexible wiring board are joined together and to provide an input device that uses the sensor unit.
[Solution] A sensor base material and a photic base material 17 such as a polarizing plate are stacked together and an opening 19 is formed in the photic base material 17. Although the joining part 32 of a flexible wiring board 31 is joined to the sensor base material, a large portion of an opposing edge 32a facing a display and input region 11a, the opposing edge 32a being part of the joining part 32, is positioned in the opening 19, so bubbles along the opposing edge 32a are less likely to be generated, making the display quality of the display and input region 11a less likely to be affected. Also, since the both-side substrate ends 36 and 36 of the joining part 32 are sandwiched between the sensor base material and the photic base material 17, the joining part 32 is less likely to be deformed, making it easy to prevent damage to the sensor base material.-
公开(公告)号：EP2346083A1
公开(公告)日：2011-07-20
申请号：EP09814664.0
申请日：2009-09-18
IPC分类号： H01L29/84 , G01P15/08 , G01P15/125
CPC分类号： G01P15/125 , B81B7/007 , B81B2203/0307 , B81B2207/07 , B81B2207/097 , B81C2203/036 , G01P1/023 , G01P15/0802 , G01P2015/0814 , H01L21/84 , H01L27/1203
摘要： Particularly, to provide an MEMS sensor with improved bonding structure between movable electrode unit supported on a first substrate side and each of support conductive unit of a fixed electrode, and a lead layer embedded in an insulating layer of a second substrate side facing the first substrate with an interval therebetween.
An MEMS sensor includes a first substrate 1, a second substrate 2, and a functional layer including a movable electrode unit and a fixed electrode unit which are interposed between the first substrate and the second substrate. A second insulating layer 30, a lead layer 35 and a connection electrode unit 32 are formed on a surface of the second substrate 2, the lead layer being embedded in the second insulating layer, and the connection electrode unit 32 making electrical connection with the lead layer and being individually connected to the support conductive units. A concave portion 37 penetrating up to a surface of the lead layer is formed in a surface of the second insulating layer 30. The connection electrode unit 32 includes a concave region 32a emulating the concave portion 37 and a connection region 32b extending on the surface of the second insulating layer 30 from one of both ends of the concave region. The support conductive units 17 are bonded to the connection region 32b of the connection electrode unit 32.摘要翻译： 特别地，为了提供一种在第一基板侧支撑的可动电极单元与固定电极的支撑导电单元之间具有改善的接合结构的MEMS传感器，以及嵌入在面向第一基板的第二基板侧的绝缘层中的引线层 间隔。 MEMS传感器包括第一基板1，第二基板2和包括位于第一基板和第二基板之间的可动电极单元和固定电极单元的功能层。 第二绝缘层30，引线层35和连接电极单元32形成在第二基板2的表面上，引线层嵌入第二绝缘层中，并且连接电极单元32与引线电连接 并且单独地连接到支撑导电单元。 在第二绝缘层30的表面上形成有贯通至引线层的表面的凹部37.连接电极单元32包括模拟凹部37的凹部32a和在该凹部37的表面上延伸的连接区域32b 第二绝缘层30从凹入区域的两端之一。 支撑导电单元17接合到连接电极单元32的连接区域32b。
-
公开(公告)号：EP3388928A1
公开(公告)日：2018-10-17
申请号：EP16873067.9
申请日：2016-12-08
CPC分类号： G06F3/044 , G01B7/22 , G06F2203/04102 , G06F2203/04111
摘要： As a capacitive sensor that is bendable and in which damage occurring in the bridge structure can be suppressed and the possibility of the sensor function becoming defective can be reduced, there is provided a capacitive sensor having a bending portion and a flat portion and bendable in the bending portion, including: a plurality of first transparent electrodes arranged side by side in a first direction in a detection area; a plurality of second transparent electrodes arranged side by side in a second direction crossing the first direction in the detection area; a coupling member provided integrally with either the plurality of first transparent electrodes or the plurality of second transparent electrodes; and a bridge wiring member provided separately from the plurality of first transparent electrodes or the plurality of second transparent electrodes, to which the coupling member is not provided, in a portion where the bridge wiring member crosses the coupling member. A direction in which the coupling member extends in the bending portion is different from a direction in which the coupling member extends in the flat portion.
-
-
-
搜索结果
4 条记录 (耗时 0.01 秒)
