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公开(公告)号:EP3502648A2
公开(公告)日:2019-06-26
申请号:EP19152264.8
申请日:2014-07-10
摘要: A balancing device (10b), a uniformity device (10u) and an apparatus (10", 10'''') including the balancing device (10b) and the uniformity device (10u) are disclosed. Each of the balancing device (10b) and the uniformity device (10u) includes at least one multi-axis transducer (50b, 50b', 114u a ) or three or more air spring members (114u b ). Methods are also disclosed.
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公开(公告)号:EP3118031B8
公开(公告)日:2017-12-20
申请号:EP16183349.6
申请日:2011-06-10
发明人: LAWSON, Lawrence J , REECE, Robert
IPC分类号: B60C25/12 , B60C25/14 , B60C25/05 , B25J15/10 , B60C25/132
CPC分类号: B25J15/10 , B60C25/0515 , B60C25/132 , B60C25/145
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