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公开(公告)号:EP4214757A1
公开(公告)日:2023-07-26
申请号:EP20954301.6
申请日:2020-09-21
申请人: Applied Materials, Inc. , National Taiwan University
发明人: CHEN, Chung-Chia , LIN, Wan-Yu , BANG, Hyunsung , XU, Lisong , YU, Gang , KWAK, Byung-Sung , VISSER, Robert Jan , WU, Chung-Chih , LIN, Hoang Yan , SU, Guo-Dong , LEE, Wei-Kai , CHEN, Yi-Jiun , HSU, Ting-Sheng , LIAO, Po-Hsiang , LIN, Wei-Cheng
IPC分类号: H01L27/32 , H01L51/52 , H05B33/02