公开(公告)号：EP0251500A1

公开(公告)日：1988-01-07

申请号：EP87304863.1

申请日：1987-06-02

申请人： BRITISH TECHNOLOGY GROUP LIMITED

发明人： Turner, Charles William

IPC分类号： G01R29/12 ,  G01R31/28

CPC分类号： G01R31/309 ,  G01R29/12 ,  G01R31/2806

摘要： A capacitor has a top plate 2 in the form of a photodiode assay and a bottom plate 2. An RF source 3 is connected between plates 1 and 2. Insulating or semiconducting material to be tested is inserted between the plates 1 and 2 to act as dielectric. Where a printed circuit board or other conductive electrical component is to be tested it forms bottom plate 2. A flying spot scanner 11 produces a modulated light beam 12 which scans the top surface of plate 1. The resulting modula-ted photocurrent envelope is detected and displayed in a display monitor 15 in synchronism with the scanning beam.

摘要翻译： 一种电容器具有顶板2中2.一种RF源3连接板1和2的绝缘或半导体材料待测试插入在板1和2以用作之间的光电二极管测定和底部板的形式 介质。 其中的印刷电路板或其他电气元件的导电是要被测试它形成底板2，一种飞点扫描器11产生一个调制的光束12，其扫描板1的上表面被检测到并且在显示得到的调制光电流的包络 与扫描光束同步的显示监视器15。