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公开(公告)号:EP2321853A4
公开(公告)日:2015-04-15
申请号:EP09807367
申请日:2009-08-14
IPC分类号: H01L31/0224 , B82Y10/00 , H01L31/0352 , H01L31/18 , H01L51/42 , H01L51/44
CPC分类号: H01L51/4253 , B82Y10/00 , H01L31/022425 , H01L31/022466 , H01L31/1884 , H01L51/0036 , H01L51/0047 , Y02E10/549