公开(公告)号：EP2382653A1

公开(公告)日：2011-11-02

申请号：EP10745824.2

申请日：2010-02-24

Applicant: BYD Company Limited

Inventor： CAI, Zhiju ,  CAO, Wenyu ,  ZHOU, Yong

IPC: H01L21/363 ,  C23C14/24 ,  H01L31/18

CPC classification number: H01L21/02631 ,  C23C14/0629 ,  C23C14/24 ,  C23C14/5806 ,  H01L21/02557 ,  H01L31/1828 ,  Y02E10/543

Abstract: A method for preparing a CdS film comprises preparing a source material coating layer from slurry by adding the source material and CdCl
2 into dispersant; performing closed space sublimation under a predetermined pressure in a protection atmosphere to deposit a film on a substrate which is placed over the coating layer; and annealing the substrate after the deposition under a predetermined temperature. Thus the method is easy for annealing without an additional annealing device with simple operability.