公开(公告)号：EP3503221A1

公开(公告)日：2019-06-26

申请号：EP18197118.5

申请日：2018-09-27

申请人： Beijing Juntai Innovation Technology Co., Ltd

发明人： HUANG, Tongyang ,  XU, Xiaohua ,  WANG, Xudong ,  GUO, Zheng ,  CAI, Cen

IPC分类号： H01L31/18 ,  H01L31/0463 ,  B23K26/082 ,  B23K26/362 ,  B23K26/06 ,  B23K26/08 ,  G02B26/10

摘要： Embodiments of the present disclosure provide a processing method for removing film and apparatus for removing film. The apparatus for removing film includes an optical component (31) and a processor (20), in which the optical component (31) includes: a laser generator (210) configured to generate a laser beam; a first scanning galvanometer (312a) configured to reflect the laser beam; and a second scanning galvanometer (312b) configured to reflect the laser beam reflected by the first scanning galvanometer (312a). The processor (20) is configured to control the laser generator (210) to generate a laser beam, and control the first scanning galvanometer (312a) and the second scanning galvanometer (312b) to deflect, thereby performing the film removal process on the target object (300').