公开(公告)号：EP2140241A1

公开(公告)日：2010-01-06

申请号：EP08743228.2

申请日：2008-04-24

申请人： Brooks Automation, Inc.

发明人： BORENSTEIN, Michael

IPC分类号： G01L7/00

CPC分类号： G01L11/00 ,  G01D3/024 ,  G01D21/00 ,  G01L15/00 ,  G01N9/00

摘要： A measurement instrument having a processor, a first sensor and a second sensor. The processor is adapted to output a measurement signal embodying a measurement of a physical quantity. The first sensor and second sensor are connected to the processor and are operable to generate respectively first and second measurements of the physical quantity. The processor defines a first measurement range within which the measurement signal is dependent on the first measurement and not the second measurement. The processor defines a second measurement range within which the measurement signal is dependent on the second measurement and not the first measurement. The first and second ranges meet at a predetermined transition. The first and second measurements are different at the transition and the measurement embodied in the measurement signal crosses the transition without an abrupt change.