公开(公告)号：EP1477796A2

公开(公告)日：2004-11-17

申请号：EP04010240.2

申请日：2004-04-29

申请人： Bruker AXS, Inc.

发明人： He, Bob Baoping ,  Schipper, Rolf Dieter

IPC分类号： G01N23/201

CPC分类号： G01N23/201

摘要： The system may function in a beam-up or a beam-down configuration. An x-ray source provides an initial x-ray beam that is directed vertically along a primary beampath to a sample located on a sample support. The small angle scattered x-ray energy travels through a secondary beampath to a detector. The primary and secondary beampaths may be evacuated and separated from a sample chamber by fluid seals. Beam conditioning optics and a collimator may be used in the primary beampath, and a beamstop used in the secondary beampath. The sample chamber may have a microscope or camera, which may be movable, for observing the sample, and a translation stage for moving the sample in at least two dimensions.

摘要翻译： 该系统可以在一个光束向上或光束向下配置的作用。 的x射线源提供有关初始x射线束被引导沿着竖直做了主beampath至位于样品支架的样品。 小角度散射的x射线能量通过次级beampath到检测器行进。 初级和次级beampaths可被抽空，并通过流体密封件从样品室分离。 光束调节光学元件和准直器可以在初级beampath被使用，并且一个波束停止在二次beampath使用。 样品室可以具有显微镜或照相机，其可以是可移动的，用于观察样品，和用于在至少两个维度上移动所述样品的平移阶段。

公开(公告)号：EP1477796A3

公开(公告)日：2004-12-01

申请号：EP04010240.2

申请日：2004-04-29

申请人： Bruker AXS, Inc.

发明人： He, Bob Baoping ,  Schipper, Rolf Dieter

IPC分类号： G01N23/201

CPC分类号： G01N23/201

摘要： The system may function in a beam-up or a beam-down configuration. An x-ray source provides an initial x-ray beam that is directed vertically along a primary beampath to a sample located on a sample support. The small angle scattered x-ray energy travels through a secondary beampath to a detector. The primary and secondary beampaths may be evacuated and separated from a sample chamber by fluid seals. Beam conditioning optics and a collimator may be used in the primary beampath, and a beamstop used in the secondary beampath. The sample chamber may have a microscope or camera, which may be movable, for observing the sample, and a translation stage for moving the sample in at least two dimensions.