专利检索 ap:("CABOT MICROELECTRONICS CORPORATION") AND inv:"LEFEVRE, Paul, Andre" 第 1 页

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发明授权
POLISHING PAD HAVING POLISHING SURFACE WITH CONTINUOUS PROTRUSIONS HAVING TAPERED SIDEWALLS 有权

公开(公告)号：EP2969392B1

公开(公告)日：2020-04-15

申请号：EP14712132.1

申请日：2014-03-05

申请人： CABOT MICROELECTRONICS CORPORATION

发明人： LEFEVRE, Paul, Andre , ALLISON, William, C. , SIMPSON, Alexander, William , SCOTT, Diane , HUANG, Ping , CHARNS, Leslie, M. , RINEHART, James, Richard , KERPRICH, Robert

IPC分类号： B24B37/26