公开(公告)号：EP0627068B1

公开(公告)日：1998-11-25

申请号：EP94903857.4

申请日：1993-12-21

申请人： CARL ZEISS JENA GmbH

发明人： BARTZKE, Karlheinz ,  SEYDEL, Eberhard ,  ANTRACK, Torsten

IPC分类号： G01B7/00

CPC分类号： G01B7/012

摘要： In a probe element for coordinate measurement systems which use micro probes (2) and piezo-resonators (3, 4, 5) whose resonance characteristics change when the probe is touched, the probe element comprises piezo-resonators (3, 4, 5) configured in a polygonal pattern on which micro-probes (2) are mounted in a polygonal pattern and trace inner and outer surface contours in various coordinates. Contact between the micro probes (2) and the surface of the sample is detected by measuring the changes in the resonance characteristics of the piezo-resonators (3, 4, 5).