专利检索 ap:("CENTRE NATIONAL DELA RECHERCHE SCIENTIFIQUE (CNRS)") AND inv:"ARNAL, Yves, Alban, Marie" 第 1 页

1.

发明公开
PROCEDE DE FABRICATION D'UN MODULATEUR DE TRANSMISSION POUR MICROLITHOGRAPHIE EN ULTRAVIOLET PROFOND ET MODULATEUR OBTENU PAR CE PROCEDE 审中-公开
标题翻译：用于生产调节剂的传输微光刻术中，深紫外调制器和打通这个过程

公开(公告)号：EP1287178A1

公开(公告)日：2003-03-05

申请号：EP01936569.1

申请日：2001-05-17

申请人： CENTRE NATIONAL DELA RECHERCHE SCIENTIFIQUE (CNRS)

发明人： GOLANSKI, André , PIAZZA, Fabrice , LACOSTE, Ana , ARNAL, Yves, Alban, Marie , PELLETIER, Jacques Henri Lucien

IPC分类号： C23C16/26 , G03F1/00

CPC分类号： C23C16/26

摘要： The invention concerns a method for making an extreme ultraviolet microlithography transmission modulator, characterised in that it consists in obtaining adamantine amorphous carbon by a process using a plasma consisting of a mixture of acetylene and argon and maintained by the power of a microwave source; in depositing a thin adamantine amorphous carbon film on a substrate with low absorption in extreme ultraviolet whereto is applied a variable polarisation; in varying the forbidden band between 1 and 2 eV through control of the argon partial pressure and in varying the corresponding extinction coefficient so as to modulate the modulator transmission without modifying the thickness of the deposited film.