专利检索 ap:("COMMISSARIAT A L'ENERGIE ATOMIQUE") AND inv:"PETIT, Jérôme" 第 1 页

1.

发明公开
UTILISATION DE LA TRANSFORMEE DE FOURIER OPTIQUE POUR LE CONTROLE DIMENSIONNEL EN MICROELECTRONIQUE 有权
标题翻译：使用合格的光学Fourier变换随着微电子尺寸公差

公开(公告)号：EP1682879A2

公开(公告)日：2006-07-26

申请号：EP04816136.8

申请日：2004-09-17

申请人： COMMISSARIAT A L'ENERGIE ATOMIQUE

发明人： PETIT, Jérôme , CHATON, Patrick , GRAND, Gilles , LEROUX, Thierry

IPC分类号： G01N21/956

CPC分类号： G01N21/956 , G01B11/0616 , G01N21/95623

摘要： The invention concerns a device for measuring dimensional or structural characteristics of an object, comprising: means (2) for forming an image of the optical Fourier transform of an elementary surface of the object in the image focal plane; processing means (26) for producing data concerning at least one dimensional and/or structural characteristic of the object based on the data supplied by the detecting means.