公开(公告)号：EP3333600A1

公开(公告)日：2018-06-13

申请号：EP16202392.3

申请日：2016-12-06

申请人： CSEM Centre Suisse d'Electronique et de Microtechnique SA - Recherche et Développement

发明人： STANLEY, Ross ,  TIMOTIJEVIC, Branislav ,  HOOGERWERF, Arnold Christiaan ,  DUNBAR, Liza Andrea

IPC分类号： G02B5/00 ,  G02B5/20 ,  G02B5/28

CPC分类号： G02B5/008 ,  G02B5/204 ,  G02B5/281 ,  G02B5/284 ,  G02B5/288

摘要： An optical device (1) is disclosed comprising an electrically conductive membrane (10) comprising a two dimensional non-periodic array (13) of sub-wavelength through-holes (12). The electrically conductive membrane (10) is arranged to reflect and transmit at least a portion of an incident light beam on the optical device (1) so that little or no loss through diffraction, scattering or the excitation of surface plasmons of the incident and transmitted light beam by the optical filter (1) occurs.
A tunable Fabry-Perot filter (50) is also disclosed comprising at least one optical device (1) comprising an electrically conductive membrane (10) comprising a two dimensional non-periodic array of sub-wavelength through-holes. The invention relates also to methods of fabrication of the optical device (1) and the tunable Fabry-Perot filter (50). The invention discloses also a method to tune the tunable Fabry-Perot filter (50) by a postprocessing etching technique.