VERFAHREN UND VORRICHTUNG ZUR VERMINDERUNG VON SPECKLE IN EINEM OPTISCHEN SYSTEM
    5.
    发明公开
    VERFAHREN UND VORRICHTUNG ZUR VERMINDERUNG VON SPECKLE IN EINEM OPTISCHEN SYSTEM 有权
    方法和装置的光学系统,减少斑点

    公开(公告)号:EP1438628A2

    公开(公告)日:2004-07-21

    申请号:EP02800106.3

    申请日:2002-09-21

    IPC分类号: G02B27/48

    CPC分类号: G03F7/70583 G02B27/48

    摘要: The invention relates to a method and device for reducing speckle in an optical system by decreasing the spatial coherence of a bundle of light beams. According to the invention, a bundle of light beams is reflected by at least two reflective surfaces each having a phase-shifting microstructuring via which the bundle of light beams (B) is split into partial bundles of beams (B') whose optical paths differ by more than the temporal coherence length. This enables the reduction of speckle while maintaining, to the greatest possible extent, the luminous intensity of the bundle of light beams.