专利检索 ap:("Carl Zeiss SMT GmbH") AND inv:"LÄMMLE, David" 第 1 页

1.

发明公开
MESH INTEGRITY CHECK 审中-公开

公开(公告)号：EP4339992A1

公开(公告)日：2024-03-20

申请号：EP23196850.4

申请日：2023-09-12

申请人： Carl Zeiss SMT GmbH

发明人： LÄMMLE, David , BUDACH, Michael , GÜNTNER, Jan , SCHOTSCH, Frans-Felix

IPC分类号： H01J37/02 , H01J37/09

摘要： The present application relates to a method for characterizing a shielding element (C) of a particle beam device (100) for shielding an electric field between a sample position and a particle beam source (101). The method comprises positioning a means for characterizing (S1, S2, S3) the shielding element on a side of the shielding element which is facing the sample position.