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1.
公开(公告)号:EP2617049B1
公开(公告)日:2018-10-10
申请号:EP11773106.7
申请日:2011-09-16
IPC分类号: H01J37/073 , H01J37/28 , H01J1/304
CPC分类号: H01J29/485 , B82Y20/00 , H01J1/3044 , H01J3/022 , H01J9/025 , H01J37/073 , H01J37/28 , H01J2201/30411 , H01J2201/30415 , H01J2201/30426 , H01J2201/30434 , H01J2201/30469 , H01J2237/06316 , H01J2237/06341 , H01J2237/26