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公开(公告)号:EP1999802A1
公开(公告)日:2008-12-10
申请号:EP07726934.8
申请日:2007-03-15
申请人: CeramTec AG
IPC分类号: H01L41/047
CPC分类号: H01L41/083 , H01L41/0471 , H01L41/094 , H01L41/273
摘要: The invention relates to a method for producing a monolithic multilayered actuator comprising a stack of thin active piezoceramic films with applied metallic inner electrodes which reciprocally lead from the stack and are electrically connected in parallel using outer electrodes.
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公开(公告)号:EP1972015A1
公开(公告)日:2008-09-24
申请号:EP06830642.2
申请日:2006-12-15
申请人: CeramTec AG
发明人: BINDIG, Reiner , HANDSCHUH, Kurt , VOIGT, Claudia , SCHMIDT, Jürgen , SCHREINER, Dr. Hans-Jürgen
IPC分类号: H01L41/047
CPC分类号: H01L41/0471 , H01L41/0477 , H01L41/083 , H01L41/094 , H01L41/1876 , H01L41/273 , H04R17/00 , Y10T29/42
摘要: A method for producing a component as monolithic multilayer element or multilayer bending element, comprising at least two layer stacks each having 1-400 layers of piezoelectrically active material which are separated by at least one layer stack comprising 0-100 layers of piezoelectrically inactive material, wherein the inner electrodes of the active layer stacks contain at least the following materials: a) pure silver b) electrically non-conductive material having a proportion by weight of 0% to at most 30% and the material of the piezoelectrically active layers has a sufficient activity in a thermal process such that sintering below the melting point of the material of the inner electrodes is possible and performed.
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