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公开(公告)号：EP2777060B1
公开(公告)日：2016-01-13
申请号：EP12784235.9
申请日：2012-11-06
发明人： LEORIER, Caroline , CARON, Serge , COURROYE, Daniel , BRENNEIS, Christophe , WIDEHEM, Michel , PLATON, Raphaël , RIGOTARD-BARBADORO, Jean-Paul , DUBUC, Fabrice , CHALAL, Smail
CPC分类号： H01J37/185 , H01J37/16 , H01J37/165
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公开(公告)号：EP2777060A1
公开(公告)日：2014-09-17
申请号：EP12784235.9
申请日：2012-11-06
发明人： LEORIER, Caroline , CARON, Serge , COURROYE, Daniel , BRENNEIS, Christophe , WIDEHEM, Michel , PLATON, Raphaël , RIGOTARD-BARBADORO, Jean-Paul , DUBUC, Fabrice , CHALAL, Smail
CPC分类号： H01J37/185 , H01J37/16 , H01J37/165
摘要： The invention relates to an electronic scanning microscope (16) for hazardous, e.g. irradiated, samples, which microscope is not provided in a negative-pressure housing but is coupled to the same (6) using a bellow junction, which has the advantage of providing a disconnection concerning the vibrations generated when maintaining the negative pressure, whereby the vibration are not transmitted to the microscope (16) and do not alter the measurements nor the image quality. The microscope electronics is not subjected to the polluted atmosphere. The housing and the device in turn have a smaller volume. The assembly can be improved by placing the microscope (16) and the housing (6) onto separate bearings. A gate divided into two portions respectively associated with the microscope and the housing can be placed at the junction and makes it possible to separate the microscope from the housing in order to facilitate the maintenance thereof.
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