-
公开(公告)号:EP2059847B1
公开(公告)日:2013-07-24
申请号:EP07808544.6
申请日:2007-08-21
IPC分类号: G02F1/1339 , G02F1/1333 , H01L51/50 , G09F9/30
CPC分类号: G02F1/1339 , G02F1/133305 , G02F2201/50 , H01L27/3251 , H01L51/5246 , H01L51/5253 , H01L2251/5338
公开(公告)号:EP2059847B1
公开(公告)日:2013-07-24
申请号:EP07808544.6
申请日:2007-08-21
IPC分类号: G02F1/1339 , G02F1/1333 , H01L51/50 , G09F9/30
CPC分类号: G02F1/1339 , G02F1/133305 , G02F2201/50 , H01L27/3251 , H01L51/5246 , H01L51/5253 , H01L2251/5338