公开(公告)号：EP1913405A2

公开(公告)日：2008-04-23

申请号：EP06786772.1

申请日：2006-07-11

申请人： Custom Sensors & Technologies, Inc.

发明人： ACAR, Cenk

IPC分类号： G01P15/00

CPC分类号： G01P15/18 ,  G01P15/0888 ,  G01P15/125 ,  G01P2015/082

摘要： Multi-axis micromachined accelerometer which, in some disclosed embodiments, has a proof mass suspended above a substrate for movement in response to acceleration along first and second axes, a first detection electrode connected to the proof mass and constrained for movement only along the first axis, and a second detection electrode connected to the proof mass and constrained for movement only along the second axis. In another embodiment, the proof mass is also movable in response to acceleration along a third axis which is perpendicular to the substrate, and a third detection electrode is mounted on the substrate beneath the proof mass for detecting movement of the proof mass in response to acceleration along the third axis. In other embodiments, two proof masses are mounted above a substrate for torsional movement about an axis perpendicular to the substrate in response to acceleration along a first axis and for rotational movement about a second axis parallel to the substrate in response to acceleration along second axis perpendicular to the substrate, a first detector having input electrodes connected to the proof masses and constrained for movement only along the first axis for detecting acceleration along the first axis, and detection electrodes mounted on the substrate beneath the proof masses for detecting rotational movement of the proof masses and acceleration along the second axis.

公开(公告)号：EP1899680A1

公开(公告)日：2008-03-19

申请号：EP06770570.7

申请日：2006-05-18

申请人： Custom Sensors & Technologies, Inc.

发明人： ACAR, Cenk ,  MAO, Minyao ,  COSTLOW, Lynn, Edward

IPC分类号： G01C19/00

CPC分类号： G01C19/5719 ,  G01C19/5712

摘要： Rate sensor comprising a plurality of generally planar masses, a drive axis in the plane of each of the masses, means for driving the masses to oscillate about the drive axes, an input axis perpendicular to the drive axes, sense axes perpendicular to the drive axes and the input axis, means mounting the masses for torsional movement about the sense axes in response to Coriolis forces produced by rotation of the masses about the input axis, and means responsive to the torsional movement about the sense axis for monitoring rate of rotation about the input axis.

公开(公告)号：EP1899734A2

公开(公告)日：2008-03-19

申请号：EP06760100.5

申请日：2006-05-18

申请人： Custom Sensors & Technologies, Inc.

发明人： ACAR, Cenk ,  MAO, Minyao

IPC分类号： G01P9/04

CPC分类号： G01C19/5712

摘要： Rate sensor comprising two generally planar proof masses, means for driving the masses to oscillate in phase opposition about parallel drive axes in the planes of the masses, an input axis perpendicular to the drive axes, sense axes perpendicular to the drive axes and the input axis, means mounting the masses for torsional movement about the sense axes in response to Coriolis forces produced by rotation of the masses about the input axis, means constraining the two masses for anti-phase movement about both the drive axes and the sense axes, sensing frames coupled to the masses for movement in response to the torsional movement of the masses about the sense axes, and means responsive to movement of the sensing frames for monitoring rate of rotation about the input axis.

摘要翻译： 速率传感器包括两个大致平面的检测质量块，用于驱动质量块在质量块平面内围绕平行驱动轴反相振荡的装置，垂直于驱动轴的输入轴，垂直于驱动轴的输入轴和输入轴 ，意味着响应于由质量块围绕输入轴线旋转产生的科里奥利力而安装质量块用于围绕感测轴线进行扭转运动，限制两个质量块围绕驱动轴线和感测轴线反相移动的装置，感测框架 响应于质量体绕感测轴线的扭转运动耦合到质量块以进行移动，以及响应于感测帧的移动以监测围绕输入轴线的旋转速率的装置。

公开(公告)号：EP1893945A1

公开(公告)日：2008-03-05

申请号：EP06760105.4

申请日：2006-05-18

申请人： Custom Sensors & Technologies, Inc.

发明人： ACAR, Cenk ,  MAO, Minyao ,  COSTLOW, Lynn Edward

IPC分类号： G01C19/00

CPC分类号： G01C19/5719

摘要： Rate sensor having a plurality of generally planar masses, means for driving the masses to oscillate about a drive axis in the planes of the masses, an input axis perpendicular to the drive axis, sense axes perpendicular to the drive axis and the input axis, means mounting the masses for torsional movement about the sense axes in response to Coriolis forces produced by rotation of the masses about the input axis, and means responsive to the torsional movement about the sense axis for monitoring rate of rotation about the input axis.

摘要翻译： 速度传感器具有多个大致平面的质量块，用于驱动质量块围绕质量块平面中的驱动轴摆动的装置，垂直于驱动轴的输入轴，垂直于驱动轴和输入轴的传感轴，装置 响应于由质量体围绕输入轴线旋转产生的科里奥利力而安装质量块用于围绕传感轴线进行扭转运动，以及响应于围绕传感轴线的扭转运动以监测围绕输入轴线的旋转速率的装置。