Multi-channel, rf-excited gas discharge laser
    1.
    发明公开
    Multi-channel, rf-excited gas discharge laser 失效
    Multikanal,RF-angeregter Gasentladungslaser

    公开(公告)号:EP0802593A1

    公开(公告)日:1997-10-22

    申请号:EP97302394.8

    申请日:1997-04-08

    IPC分类号: H01S3/0975

    CPC分类号: H01S3/0975

    摘要: The invention relates to a multi-channel RF-excited gas laser device which has an elongate tubular dielectric housing 1. The housing has a common elongate ground electrode 2 therewithin and a plurality of laser channels 4 defined within and extending along the ground electrode 2 adjacent to an interior surface 3 of the dielectric housing. A laser gas is provided within the dielectric housing and a plurality of RF electrodes 7 are disposed adjacent to and extending along an external surface 8 of the dielectric housing 1. Each RF electrode 7 is disposed in registration with one of the laser channels 4.

    摘要翻译: 本发明涉及一种具有细长管状电介质外壳1的多通道RF激发气体激光装置。外壳在其中具有共同的细长接地电极2和限定在邻近的接地电极2内并沿接地电极2延伸的多个激光通道4 到介电壳体的内表面3。 激光气体设置在电介质外壳内,并且多个RF电极7被布置成与电介质外壳1的外表面8相邻并延伸。每个RF电极7设置成与激光通道4之一对准。 IMAGE>