HYDROGEN DETECTION SENSOR AND MANUFACTURING METHOD THEREFOR

    公开(公告)号:EP4170337A1

    公开(公告)日:2023-04-26

    申请号:EP21828256.4

    申请日:2021-04-13

    IPC分类号: G01N27/407

    摘要: A hydrogen detecting sensor is initiated. The hydrogen detecting sensor include a substrate; a heater layer formed on the substrate so as to generate heat; a sensing element formed on a top face of the heater layer, wherein the sensing element includes a sensing layer, wherein the sensing layer has a structure in which two or more alloy layers are stacked, wherein each of the two or more alloy layers is made of an alloy of a catalyst metal and a transition metal, wherein an electrical resistance of the catalyst metal reversibly changes when the catalyst metal adsorbs hydrogen, wherein a ratio of a content of the transition metal to a content of the catalyst metal in each of the two or more alloy layers continuously changes based on a vertical level metal in each of the two or more alloy layers, wherein the sensing element measures an electrical resistance based on a hydrogen concentration; and a compensation element formed on the top face of the heater layer so as to be spaced apart from the sensing element, wherein the compensation element includes: a material having the same structure as the structure of the sensing layer; and a protective layer covering the material layer so as to prevent an external substance from invading the material layer, wherein the compensation element measures an electrical resistance based on temperature change.

    HYDROGEN SENSOR AND MANUFACTURING METHOD THEREFOR

    公开(公告)号:EP3998472A1

    公开(公告)日:2022-05-18

    申请号:EP20837850.5

    申请日:2020-07-10

    摘要: Disclosed is a hydrogen sensor. The hydrogen sensor includes a substrate; a color changeable layer disposed on the substrate and made of an oxide semiconductor material, wherein when the oxide semiconductor material reacts with hydrogen ions or hydrogen atoms, a color thereof changes; a catalyst layer disposed on a surface of the color changeable layer and made of a catalyst material, wherein the catalyst material dissociates hydrogen molecules (H2) into hydrogen atoms (H) or hydrogen ions (H + ); and a protective layer disposed to cover a surface of the catalyst layer and an exposed surface of the color changeable layer, and made of a polymer material, wherein the polymer material allows hydrogen molecules to pass therethrough but blocks water molecules.