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1.发明公开PROBE FOR SCANNING MICROSCOPE PRODUCED BY FOCUSED ION BEAM MACHINING 审中-公开SONDEFÜREIN ABTASTMIKROSKOP，HERGESTELLT DURCH BEARBEITUNG MIT FOKUSSIERTEM IONENSTRAHL
公开(公告)号：EP1278056A1
公开(公告)日：2003-01-22
申请号：EP01970309.9
申请日：2001-09-28
发明人： NAKAYAMA, Yoshikazu , AKITA, Seiji , HARADA, Akio, c/o Daiken Chemical Co., Ltd. , OKAWA, Takashi, c/o DAIKEN Chemical Co., Ltd. , TAKANO, Yuichi, c/o DAIKEN Chemical Co., Ltd. , YASUTAKE, Masatoshi, c/o SEIKO Instruments Inc. , SHIRAKAWABE, Yoshiharu, c/o SEIKO Instruments Inc.
摘要： The present invention realizes a probe for a scanning type microscope by which the quality of a nanotube probe needle can be improved by means of fastening and cutting the nanotube probe needle, furthermore by means of implanting ions of another element. For the object, a probe for a scanning type microscope produced by a focusing ion beam related to the present invention is characterized in that, in a probe for a scanning type microscope which captures substance information of the surface of a specimen by the tip end 14a of a nanotube probe needle 12 fastened to a cantilever 4, an organic gas G is decomposed by a focused ion beam I in a focused ion beam apparatus 2, and the nanotube 12 is bonded to the cantilever 4 with a deposit of the decomposed component thus produced. Furthermore, the present invention provides a probe for a scanning type microscope by which the quality of the nanotube probe needle can be improved by means of removing an unnecessary deposit 24 adhering to the nanotube tip end portion 14 using a ion beam I, by means of cutting an unnecessary part of the nanotube in order to control length of the probe needle and by means of injecting ions into the tip end portion 14 of the nanotube.
摘要翻译： 本发明实现了扫描型显微镜的探针，借助于通过固定和切割纳米管探针，还可以通过注入另一元件的离子来提高纳米管探针的质量。 为了该目的，本发明涉及的由聚焦离子束产生的扫描型显微镜的探针的特征在于，在用于通过前端14a拍摄试样表面的物质信息的扫描式显微镜用探针 在紧固到悬臂4的纳米管探针12上，有机气体G在聚焦离子束装置2中被聚焦离子束I分解，并且纳米管12以分解成分的沉积物结合到悬臂4上 产生的。 此外，本发明提供了一种扫描型显微镜的探针，通过该扫描型显微镜，可以通过使用离子束I去除附着在纳米管末端部14上的不必要的沉积物24，从而可以提高纳米管探针的质量，借助于 切割不需要的纳米管部分，以便控制探针的长度，并通过将离子注入到纳米管的末端部分14中。
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2.发明公开CANTILEVER FOR VERTICAL SCANNING MICROSCOPE AND PROBE FOR VERTICAL SCAN MICROSCOPE USING IT 审中-公开KRAGTRÄGERFÜRVERTIKAL-ABTASTMIKROSKOP UND SONDEFÜRVERTIKAL-ABTASTMIKROSKOP DAMIT
公开(公告)号：EP1278055A1
公开(公告)日：2003-01-22
申请号：EP01970308.1
申请日：2001-09-28
发明人： NAKAYAMA, Yoshikazu , AKITA, Seiji , HARADA, Akio, c/o Daiken Chemical Co., Ltd. , OKAWA, Takashi, c/o DAIKEN Chemical Co., Ltd. , TAKANO, Yuichi, c/o DAIKEN Chemical Co., Ltd. , YASUTAKE, Masatoshi, c/o SEIKO Instruments Inc. , SHIRAKAWABE, Yoshiharu, c/o SEIKO Instruments Inc.
摘要： The present invention realizes a probe for a vertical scanning type microscope in which a tip end of a nanotube serving as a probe is caused to abut substantially perpendicularly against the surface of a specimen and can detect surface information of a specimen at a high sensitivity. In order to accomplish the object, in a probe 20 for a scanning type microscope which captures substance information of the surface of a specimen 24 by the tip end of a nanotube probe needle fastened to a cantilever 2, a probe for a vertical scanning type microscope related to the present invention is characterized in that a fixing region, to which the base end portion 14 of a nanotube 12 is fastened, is provided in a cantilever 2 and when the cantilever 2 is set in a measuring state with respect to a mean surface 26 of a specimen, height direction of the above described fixing region is set up substantially perpendicular to the mean surface 26 of the specimen and the base end portion 14 of the nanotube 12 is bonded in the height direction of the fixing region.
摘要翻译： 本发明实现了一种用于垂直扫描型显微镜的探针，其中用作探针的纳米管的末端大致垂直地抵靠试样的表面，并且可以以高灵敏度检测样品的表面信息。 为了实现该目的，在扫描型显微镜的探针20中，通过紧固在悬臂2上的纳米管探针的前端捕获试样24的表面的物质信息，用于垂直扫描式显微镜的探针 本发明的特征在于，在悬臂2中设置固定有纳米管12的基端部14的固定区域，当悬臂2相对于平均面设置为测量状态时 26的上述固定区域的高度方向与试样的平均面26大致垂直地设置，并且在固定区域的高度方向上接合有纳米管12的基端部14。
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