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    Substrate transport apparatus and transport teaching system
    2.
    发明公开
    Substrate transport apparatus and transport teaching system 有权
    TransportvorrichtungfürSubstrate und ihr Lehrsystem

    公开(公告)号：EP1103354A1

    公开(公告)日：2001-05-30

    申请号：EP00126011.6

    申请日：2000-11-28

    申请人： Dainippon Screen Mfg. Co., Ltd. ,  Kawasaki Jukogyo Kabushiki Kaisha

    发明人： Kawamatsu, Yasuo, Dainippon Screen Mfg. Co., Ltd. ,  Watanabe, Yoshihiko, Dainippon Screen Mfg. Co. Ltd ,  Hashimoto, Yasuhiko

    IPC分类号： B25J19/02 ,  H01L21/68 ,  H01L21/00

    CPC分类号： H01L21/6835 ,  B25J19/025 ,  H01L21/681 ,  H01L21/68707 ,  H01L2924/3025

    摘要： To provide a substrate transport device and a transport teaching system which can automatically perform a teaching processing in order to reduce the burden of an operator and to eliminate a positional shift accurately and efficiently in a short time. Optical connectors 251, 252, 253 and 254 of a jig 200 and optical connectors 256, 257, 258 and 259 fixedly provided on a substrate transport device are opposed to each other and optical axes are coincident with each other. A lens having a high condensation ratio is provided in each optical connector. A light signal is output from optical sensor heads 231 and 241 through an optical fiber F2, each optical connector and an optical fiber F1, and a light signal input to optical sensor heads 232 and 242 is guided into the substrate transport device. Then, an arm 31b is automatically moved in a three-axis direction. Thus, an edge position of a detected portion 122 is detected to acquire positional information so that teaching information is obtained.

    摘要翻译： 为了提供能够自动执行教学处理以减少操作者的负担并且在短时间内精确有效地消除位置偏移的基底传送装置和传送教学系统。 固定设置在基板输送装置上的夹具200的光连接器251,252,253和254以及固定设置在基板输送装置上的光连接器256,257,258,259彼此相对并且光轴彼此重合。 在每个光连接器中设置具有高冷凝率的透镜。 光信号通过光纤F2从光学传感器头231和241输出，每个光学连接器和光纤F1，以及输入到光学传感器头232和242的光信号被引导到衬底传送装置中。 然后，臂31b沿三轴方向自动移动。 因此，检测到检测部分122的边缘位置以获取位置信息，从而获得教学信息。