APPARATUS AND METHOD FOR HIGH-SPEED PHASE SHIFTING FOR INTERFEROMETRIC MEASUREMENT SYSTEMS
    1.
    发明公开
    APPARATUS AND METHOD FOR HIGH-SPEED PHASE SHIFTING FOR INTERFEROMETRIC MEASUREMENT SYSTEMS 审中-公开
    VORRICHTUNG UND VERFAHREN ZUR SCHNELLEN PHASENUMTASTUNGFÜRINTERFERROMETRISCHE MESSSYSTEME

    公开(公告)号:EP2399098A1

    公开(公告)日:2011-12-28

    申请号:EP09840534.3

    申请日:2009-02-23

    IPC分类号: G01B11/25 G01B11/24

    摘要: Described are a method and apparatus for high-speed phase shifting of an optical beam. A transparent plate having regions of different optical thickness is illuminated by an optical beam along a path of incidence that extends through the regions. The transparent plate can be moved or the optical beam can be steered to generate the path of incidence. The optical beam exiting the transparent plate has an instantaneous phase value according to the region in which the optical beam is incident. Advantageously, the phase values are repeatable and stable regardless of the location of incidence of the optical beam within the respective regions, and phase changes at high modulation rates are possible. The method and apparatus can be used to modulate a phase difference of a pair of coherent optical beams such as in an interferometric fringe projection system.

    摘要翻译: 描述了用于光束的高速相移的方法和装置。 具有不同光学厚度的区域的透明板被沿着穿过该区域的入射路径的光束照射。 可以移动透明板,或者使光束转向以产生入射路径。 离开透明板的光束根据光束入射的区域具有瞬时相位值。 有利地,无论光束在各个区域内的入射位置如何,相位值是可重复和稳定的,并且在高调制速率下的相位变化是可能的。 该方法和装置可用于调制一对相干光束的相位差,例如在干涉条纹投影系统中。