DISTILLATION PROCESS FOR REDUCING THE CONCENTRATION OF DINITROGEN DIFLUORIDE AND DINITROGEN TETRAFLUORIDE IN NITROGEN TRIFLUORIDE
    2.
    发明授权
    DISTILLATION PROCESS FOR REDUCING THE CONCENTRATION OF DINITROGEN DIFLUORIDE AND DINITROGEN TETRAFLUORIDE IN NITROGEN TRIFLUORIDE 有权
    蒸馏用于减少二氟化二氮的浓度和四氟化氮三氟化二氮

    公开(公告)号:EP1611055B1

    公开(公告)日:2008-05-28

    申请号:EP04750024.4

    申请日:2004-04-08

    IPC分类号: C01B21/083

    CPC分类号: C01B21/0837 C01P2006/80

    摘要: Disclosed is a distillation process for reducing the concentration of impurities dinitrogen difluoride and dinitrogen tetrafluoride in nitrogen trifluoride. The process comprises: (a) distilling a mixture comprising nitrogen trifluoride and dinitrogen difluoride and/or dinitrogen tetrafluoride in a distillation column in the presence of a compound having a higher normal boiling point than nitrogen trifluoride; (b) removing a mixture comprising dinitrogen difluoride and/or dinitrogen tetrafluoride as a sidedraw from the distillation column; (c) removing a mixture comprising the compound having a higher normal boiling point than nitrogen trifluoride from the bottom of the distillation column; and (d) removing a nitrogen trifluoride product having reduced concentration of dinitrogen difluoride and/or dinitrogen tetrafluoride from the top of the distillation column.