公开(公告)号：EP0735564B1

公开(公告)日：2003-11-05

申请号：EP96105077.0

申请日：1996-03-29

申请人： EBARA CORPORATION ,  Hatamura, Yotaro

发明人： Hatakeyama, Masahiro ,  Ichiki, Katsunori ,  Kato, Takao ,  Kajiyama, Masaaki ,  Tsuzuki, Takashi ,  Hatamura, Yotaro ,  Nakao, Masayuki

IPC分类号： H01J37/30 ,  H01J37/20

CPC分类号： H01J37/3005 ,  H01J37/20

公开(公告)号：EP0735564A3

公开(公告)日：1998-01-14

申请号：EP96105077.0

申请日：1996-03-29

申请人： EBARA CORPORATION ,  Hatamura, Yotaro

发明人： Hatakeyama, Masahiro ,  Ichiki, Katsunori ,  Kato, Takao ,  Kajiyama, Masaaki ,  Tsuzuki, Takashi ,  Hatamura, Yotaro ,  Nakao, Masayuki

IPC分类号： H01J37/30 ,  H01J37/20

CPC分类号： H01J37/3005 ,  H01J37/20

摘要： A micro-working apparatus performs fabrication and assembly tasks for micron/nanometer sized objects while observing the progress of work in real-time under at least a pair of optical or electron microscopes to provide simultaneous views from at least two directions, thus offering a spatial visual information regarding the working space which is particularly critical in micro-working. Micro-working is further facilitated by the use of a micro-pallet device specially designed for use in the apparatus, but also offering other application possibilities. Rotational and parallel translation movements provided by the micro-pallet combined with the micro-working capability of the apparatus are utilized to demonstrate the production of micron-sized parts for use in advanced applications of optical and electronic devices.

公开(公告)号：EP0735564A2

公开(公告)日：1996-10-02

申请号：EP96105077.0

申请日：1996-03-29

申请人： EBARA CORPORATION ,  Hatamura, Yotaro

发明人： Hatakeyama, Masahiro ,  Ichiki, Katsunori ,  Kato, Takao ,  Kajiyama, Masaaki ,  Tsuzuki, Takashi ,  Hatamura, Yotaro ,  Nakao, Masayuki

IPC分类号： H01J37/30 ,  H01J37/20

CPC分类号： H01J37/3005 ,  H01J37/20

摘要： A micro-working apparatus performs fabrication and assembly tasks for micron/nanometer sized objects while observing the progress of work in real-time under at least a pair of optical or electron microscopes to provide simultaneous views from at least two directions, thus offering a spatial visual information regarding the working space which is particularly critical in micro-working. Micro-working is further facilitated by the use of a micro-pallet device specially designed for use in the apparatus, but also offering other application possibilities. Rotational and parallel translation movements provided by the micro-pallet combined with the micro-working capability of the apparatus are utilized to demonstrate the production of micron-sized parts for use in advanced applications of optical and electronic devices.

摘要翻译： 微型加工设备对微米/纳米尺寸的物体执行制造和组装任务，同时在至少一对光学或电子显微镜下实时观察工作进展，以从至少两个方向提供同时观看，从而提供空间 关于微型工作特别关键的工作空间的视觉信息。 通过使用专门设计用于该设备的微型托盘装置，还提供其他应用的可能性，进一步促进了微加工。 微型托盘提供的旋转和平行平移运动结合设备的微加工能力被用来证明用于光学和电子设备的先进应用的微米级部件的生产。