公开(公告)号：EP0275306A4

公开(公告)日：1988-12-12

申请号：EP87905370

申请日：1987-07-30

申请人： ELECTROSCAN CORP

发明人： DANILATOS GERASIMOS D

IPC分类号： G01N23/225 ,  G01Q30/02 ,  G01Q30/12 ,  G01Q30/16 ,  H01J37/20 ,  H01J37/244 ,  H01J37/28 ,  H01J49/06

CPC分类号： H01J37/28

公开(公告)号：EP0314763A4

公开(公告)日：1989-12-13

申请号：EP88904896

申请日：1988-05-17

申请人： ELECTROSCAN CORP

发明人： MANCUSO JAMES F ,  MAXWELL WILLIAM B ,  DANILATOS GERASIMOS D

IPC分类号： H01J37/28 ,  H01J37/06 ,  H01J37/244 ,  H01J37/252

CPC分类号： H01J37/244 ,  H01J2237/2448 ,  H01J2237/2449 ,  H01J2237/24507

摘要： The invention provides for a device and method for generating, amplifying, and detecting secondary electrons from a surface of a sample. The device contains a vacuum envelope (1) having a pressure limiting aperture (2), a charged particle beam source (3), means (4, 5) for focusing and directing the charged particle beam through the aperture (2) to a sample mounted on a sample platform (6) located in a gaseous environment outside of the vacuum envelope (1), an electrode (7) located outside of the vacuum envelope (1) and close to the sample platform (6). In operation, the electrode is biased by a voltage source (8) to accelerate secondary electrons emitted by the sample so that they collide with gas molecules to produce negative charge carriers which multiply by further collisions. The negative charge carriers are collected by the electrode (7) to produce a current which is amplified by a current amplifier (4) and output to a detector (10).