公开(公告)号：EP1317875A1

公开(公告)日：2003-06-11

申请号：EP01964918.5

申请日：2001-08-17

Applicant: EPCOS AG

Inventor： WIEST, Florian ,  EISELE, Ignaz

IPC: H05K3/10 ,  H05K3/00 ,  H01F41/04 ,  G03F7/20

CPC classification number: H01F41/041 ,  G03F7/164 ,  H05K1/0284 ,  H05K3/0082 ,  H05K3/108 ,  H05K3/403 ,  H05K2201/09018 ,  H05K2203/135

Abstract: The invention relates to a method for producing an electrically conductive structure on a non-planar surface (1) comprising the following steps: a) electrochemical deposition of a photo resist layer (2) on the surface (1) b) exposure of sections of the photo resist layer (2) c) removal of one section of the photo resist layer (2) by a developing process d) deposition of an electrically conductive material (3) on the sections of the surface (1) that are devoid of the photo resist layer (2). The invention also relates to a method for producing miniaturised coils. The electrochemical deposition of the photo resist on the non-planar surface enables an extremely uniform thickness to be achieved for the layer.