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公开(公告)号：EP1529560B1
公开(公告)日：2010-06-02
申请号：EP04007629.1
申请日：2004-03-30
申请人： Erc Inc.
CPC分类号： G05D16/2066 , B01D19/0031 , B01D19/0063 , F04B37/14 , F04B2205/01
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公开(公告)号：EP1529560A3
公开(公告)日：2005-09-28
申请号：EP04007629.1
申请日：2004-03-30
申请人： Erc Inc.
CPC分类号： G05D16/2066 , B01D19/0031 , B01D19/0063 , F04B37/14 , F04B2205/01
摘要： There is provided a vacuum control system for allowing the degree of vacuum in a vacuum vessel to be kept constant, effectively and accurately removing vaporized components degassed into the vacuum vessel through a gas permeation diaphragm by stably introducing a very small amount of air into a vacuum exhaust path, and thus operating stably, and a vacuum degassing apparatus employing the vacuum control system. The vacuum control system controls the rotatory power of a DC brushless motor 3, continuously controls displacement of a vacuum pump 1, and thus keeps the degree of vacuum in a vacuum vessel constant, by decompressing the inside of the vacuum vessel 1 using an exhaust vacuum pump 2 which operates with the DC brushless motor 3, monitoring the inside pressure of the vacuum vessel using a pressure sensor 5, and controlling a voltage applied to the DC brushless motor on the basis of an output signal resulting from measurement of the inside pressure of the vacuum vessel by the pressure sensor.
摘要翻译： 提供了一种真空控制系统，用于通过将非常少量的空气稳定地引入真空中，通过气体渗透膜将真空容器中的真空度保持恒定，有效且准确地去除脱气到真空容器中的蒸发组分 排气路径，从而稳定地运行，以及采用真空控制系统的真空脱气装置。 真空控制系统控制直流无刷电动机3的旋转动力，连续地控制真空泵1的位移，通过使用排气真空减压真空容器1的内部，使真空容器内的真空度保持恒定 泵2，其与直流无刷电动机3一起工作，使用压力传感器5监测真空容器的内部压力，并且基于由内部压力测量得到的输出信号来控制施加到直流无刷电动机的电压 真空容器由压力传感器。
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公开(公告)号：EP1529560A2
公开(公告)日：2005-05-11
申请号：EP04007629.1
申请日：2004-03-30
申请人： ERC Inc.
IPC分类号： B01D19/00 , D06M13/535 , D06M15/715 , G05D16/04
CPC分类号： G05D16/2066 , B01D19/0031 , B01D19/0063 , F04B37/14 , F04B2205/01
摘要： There is provided a vacuum control system for allowing the degree of vacuum in a vacuum vessel to be kept constant, effectively and accurately removing vaporized components degassed into the vacuum vessel through a gas permeation diaphragm by stably introducing a very small amount of air into a vacuum exhaust path, and thus operating stably, and a vacuum degassing apparatus employing the vacuum control system. The vacuum control system controls the rotatory power of a DC brushless motor 3, continuously controls displacement of a vacuum pump 1, and thus keeps the degree of vacuum in a vacuum vessel constant, by decompressing the inside of the vacuum vessel 1 using an exhaust vacuum pump 2 which operates with the DC brushless motor 3, monitoring the inside pressure of the vacuum vessel using a pressure sensor 5, and controlling a voltage applied to the DC brushless motor on the basis of an output signal resulting from measurement of the inside pressure of the vacuum vessel by the pressure sensor.
摘要翻译： 提供了一种真空控制系统，用于使真空容器中的真空度保持恒定，有效和精确地通过气体渗透隔膜去除进入真空容器的汽化成分，通过将非常少量的空气稳定地引入真空 排气路径并因此稳定地运行，以及采用该真空控制系统的减压脱气装置。 真空控制系统控制DC无刷电动机3的旋转动力，通过使用排气真空对真空容器1内进行减压，从而连续地控制真空泵1的排气量，从而使真空容器内的真空度保持恒定 与直流无刷电动机3一起动作的泵2，利用压力传感器5监视真空容器内的压力，根据测定内部压力的输出信号控制施加于直流无刷电动机的电压 真空容器由压力传感器控制。
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