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    SHAFT SEAL DEVICE
    1.
    发明公开
    SHAFT SEAL DEVICE 有权
    轴封装置

    公开(公告)号：EP2719930A1

    公开(公告)日：2014-04-16

    申请号：EP12797319.6

    申请日：2012-04-24

    申请人： Eagle Industry Co., Ltd. ,  EagleBurgmann Japan Co., Ltd.

    发明人： TAKAHASHI Hidekazu ,  SUZUKI Shigeru ,  TOJYO Toshinobu

    IPC分类号： F16J15/34 ,  F16J15/447

    CPC分类号： F16J15/004 ,  F16J15/3484

    摘要： Provided is a shaft seal assembly that can restrain an entry of foreign substances into a sealed region for an application with a vacuum in the sealed region.
    A first seal structure 100 includes a first stationary ring and a first rotating ring, and is a non-contacting seal structure having a small gap between an end face of the first stationary ring at an atmosphere side and an end face of the first rotating ring at a sealed region side, a second seal structure 200 includes a second stationary ring and a second rotating ring, and is a contacting seal structure in which an axial end face of the second stationary ring and an axial end face of the second rotating ring slide relative to each other, a seal cover 300 is fixed to the first stationary ring and the second stationary ring at an outer circumference side, the seal cover forming a sealed space R between the first seal structure 100 and the second seal structure 200, and a vacuum generating mechanism 700 capable of providing a vacuum in the sealed space R is included.