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公开(公告)号：EP3533509A1
公开(公告)日：2019-09-04
申请号：EP19159187.4
申请日：2019-02-25
申请人： Ebara Corporation
摘要： A wet abatement system which can suppress the accumulation of foreign matters in a treatment gas line is proposed. There is provided a wet abatement system for detoxifying treatment gas by bringing the treatment gas into contact with liquid. The wet abatement system includes an inlet casing having an inlet port from which the treatment gas is let in and an outlet port provided below the inlet port and through which the treatment gas flows, and a liquid film forming device provided between the inlet port and the outlet port and configured to form a liquid film on an inner wall surface of the inlet casing. A heater configured to heat the inlet casing is embedded in an interior of a wall portion of the inlet casing, the wall portion constituting a portion situated above the liquid film forming device.
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公开(公告)号：EP2818225A1
公开(公告)日：2014-12-31
申请号：EP14173683.5
申请日：2014-06-24
申请人： EBARA CORPORATION
IPC分类号： B01D53/00
CPC分类号： F02C7/08 , B01D53/005 , B01D53/18 , B01D53/70 , B01D53/78 , B01D2252/103 , B01D2257/2045 , B01D2257/2047 , B01D2257/2066 , B01D2257/553 , B01D2258/0216 , F23G7/065 , F23J15/04 , F23J2219/40 , F28C3/06 , F28D1/0213 , F28D1/05316 , F28D7/082 , F28D7/16 , Y02P80/156
摘要： An exhaust gas abatement system includes an exhaust gas abatement section configured to abate exhaust gases by utilizing thermal energy and to cool the abated gases by using a liquid, a circulating section configured to circulate the liquid within a circulation path as a circulating liquid, a heat exchange tube configured to cool the circulating liquid and to executes a heat exchange between a cooling liquid which flows in an interior of the heat exchange tube and the circulating liquid which flows outside the heat exchange tube, and a circulating liquid storage portion configured to store the circulating liquid. The heat exchange tube is disposed in a heat exchange tube installation space which is in at least part of an interior of the circulating liquid storage portion.
摘要翻译： 排气净化系统包括：排气消减部，其构造为通过利用热能来减少废气，并且通过使用液体来冷却排出的气体;循环部，其被配置为使作为循环液体的循环路径内的液体循环;热量 配置为冷却循环液体并进行在热交换管内流动的冷却液与流过热交换管的循环液体之间的热交换的交换管;以及循环液储存部， 循环液体。 热交换管设置在至少部分循环液储存部的内部的热交换管安装空间内。
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公开(公告)号：EP2818225B1
公开(公告)日：2018-08-08
申请号：EP14173683.5
申请日：2014-06-24
申请人： Ebara Corporation
CPC分类号： F02C7/08 , B01D53/005 , B01D53/18 , B01D53/70 , B01D53/78 , B01D2252/103 , B01D2257/2045 , B01D2257/2047 , B01D2257/2066 , B01D2257/553 , B01D2258/0216 , F23G7/065 , F23J15/04 , F23J2219/40 , F28C3/06 , F28D1/0213 , F28D1/05316 , F28D7/082 , F28D7/16 , Y02P80/156
摘要： An exhaust gas abatement system includes an exhaust gas abatement section configured to abate exhaust gases by utilizing thermal energy and to cool the abated gases by using a liquid, a circulating section configured to circulate the liquid within a circulation path as a circulating liquid, a heat exchange tube configured to cool the circulating liquid and to executes a heat exchange between a cooling liquid which flows in an interior of the heat exchange tube and the circulating liquid which flows outside the heat exchange tube, and a circulating liquid storage portion configured to store the circulating liquid. The heat exchange tube is disposed in a heat exchange tube installation space which is in at least part of an interior of the circulating liquid storage portion.
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公开(公告)号：EP3254745A1
公开(公告)日：2017-12-13
申请号：EP17174593.8
申请日：2017-06-06
申请人： Ebara Corporation
CPC分类号： B01D53/005 , B01D53/70 , B01D2258/0216
摘要： A dry vacuum pump with an abatement function includes: a dry pump (1) configured to evacuate exhaust gas from a tool (200) ; an abatement module (2) configured to detox the exhaust gas evacuated by the dry pump (1); and a flow path (3) configured to connect the dry pump (1) and the abatement module (2) directly to each other in an undetachable manner.
摘要翻译： 具有减排功能的干式真空泵包括：配置成从工具（200）排空排气的干式泵（1）; （2），配置成将由所述干泵（1）排空的排气排出; 和构造成以不可拆卸的方式将干泵（1）和减排模块（2）直接彼此连接的流动路径（3）。
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公开(公告)号：EP2957334A1
公开(公告)日：2015-12-23
申请号：EP15172573.6
申请日：2015-06-17
申请人： Ebara Corporation
CPC分类号： B01D53/869 , B01D53/70 , B01D53/72 , B01D53/8631 , B01D53/8653 , B01D53/8656 , B01D53/90 , B01D2251/202 , B01D2251/204 , B01D2251/208 , B01D2255/1021 , B01D2255/1023 , B01D2255/1025 , B01D2255/2073 , B01D2255/20761 , B01D2255/2092 , B01D2255/30 , B01D2257/204 , B01D2257/206 , B01D2257/404 , B01D2257/556 , B01D2258/0216 , F01N3/2006 , F01N3/2066 , F01N2570/14
摘要： An exhaust gas treatment apparatus which can reduce NOx (nitrogen oxide) produced as a by-product at the time of treating an exhaust gas by applying a three-way catalytic process is disclosed. The exhaust gas treatment apparatus has an oxidative decomposition unit configured to oxidatively decompose an exhaust gas and an exhaust gas cleaning unit configured to clean the exhaust gas after oxidative decomposition. The exhaust gas treatment apparatus includes a nitrogen oxide removing unit disposed at a stage subsequent to the oxidative decomposition unit and configured to remove a nitrogen oxide contained in the exhaust gas. The nitrogen oxide removing unit is configured to supply at least one of hydrocarbon and carbon monoxide into the exhaust gas discharged from the oxidative decomposition unit to cause the at least one of hydrocarbon and carbon monoxide to react with oxygen remaining in the exhaust gas, thereby removing oxygen from the exhaust gas, and thereafter to cause the nitrogen oxide in the exhaust gas to react with the at least one of hydrocarbon and carbon monoxide.
摘要翻译： 本发明公开了一种废气处理装置，其能够减少在通过应用三元催化过程处理废气时作为副产物产生的NOx（氮氧化物）。 废气处理设备具有构造成氧化分解废气的氧化分解单元和构造成清洁氧化分解后的废气的废气清洁单元。 该废气处理设备包括设置在氧化分解单元之后的阶段的氮氧化物除去单元，该氮氧化物除去单元被配置为除去废气中所含的氮氧化物。 氮氧化物除去单元被构造成将烃和一氧化碳中的至少一种供应到从氧化分解单元排出的排气中，以使碳氢化合物和一氧化碳中的至少一种与残留在排气中的氧反应，从而去除 从排气中除去氧气，然后使排气中的氮氧化物与碳氢化合物和一氧化碳中的至少一种反应。
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