公开(公告)号：EP1753958B1

公开(公告)日：2009-06-17

申请号：EP05738125.3

申请日：2005-04-26

申请人： Edwards Limited

发明人： NORTH, Phillip, c/o BOC Edwards ,  MANSON, David, Paul, c/o BOC Edwards

IPC分类号： F04B53/00 ,  C23C16/44

CPC分类号： F04D19/046 ,  C23C16/4412 ,  F04B53/06 ,  F04D19/042 ,  Y10T137/0324 ,  Y10T137/0419 ,  Y10T137/8593 ,  Y10T137/87877

摘要： A system (100) for supplying an inert purge gas to a pumping arrangement (106) includes a plurality of flexible capillary tubes (102) each for conveying the gas from a respective outlet of a manifold (12) to a respective port (104) of the pumping arrangement (106). The internal diameter and length of each tube (102) control the gas flow rate to the respective port (104).