公开(公告)号：EP1438315B1

公开(公告)日：2006-09-27

申请号：EP02772548.0

申请日：2002-10-25

申请人： EPICHEM LIMITED

发明人： JONES, Anthony Copeland

IPC分类号： C07F7/00 ,  C07F5/00 ,  C23C16/18 ,  C23C16/40 ,  C07C31/28

CPC分类号： C07F7/006 ,  C07F5/003

摘要： Ti, Zr Hf and La precursors for use in MOCVD techniques have a ligand of the general formula OCR (R )CH2X, wherein R is H or an alkyl group, R is an optionally substituted alkyl group and X is selected from OR and NR2, wherein R is an alkyl group or a substituted alkyl group.

公开(公告)号：EP1603924A2

公开(公告)日：2005-12-14

申请号：EP04719537.5

申请日：2004-03-11

申请人： EPICHEM LIMITED

发明人： JONES, Anthony Copeland

IPC分类号： C07F5/00 ,  C23C16/40

CPC分类号： C07F5/003 ,  C23C16/40

摘要： Rare earth metal precursors, for use in MOCVD techniques have a ligand of the general formula OCR1(R2)CH2X, wherein R1 is H or an alkyl group, R2 is an optionally substituted alkyl group and X is selected from OR and NR2,wherein R is an alkyl group or a substituted alkyl group. Methods of making such precursors and methods of depositing metal oxide layers from such precursors are also described.

公开(公告)号：EP1438315A2

公开(公告)日：2004-07-21

申请号：EP02772548.0

申请日：2002-10-25

申请人： Epichem Limited

发明人： JONES, Anthony Copeland

IPC分类号： C07F7/00 ,  C07F5/00 ,  C23C16/18 ,  C23C16/40 ,  C07C31/28

CPC分类号： C07F7/006 ,  C07F5/003

摘要： Ti, Zr Hf and La precursors for use in MOCVD techniques have a ligand of the general formula OCR1(R2)CH2X, wherein R1 is H or an alkyl group, R2 is an optionally substituted alkyl group and X is selected from OR and NR¿2?, wherein R is an alkyl group or a substituted alkyl group.