公开(公告)号：EP1890137A1

公开(公告)日：2008-02-20

申请号：EP07114356.4

申请日：2007-08-15

申请人： FEI COMPANY

发明人： Mulders, Johannes ,  Roussel, Laurent ,  Busing, Wilhelmus

IPC分类号： G01N23/225

CPC分类号： G01N23/225 ,  H01J2237/31745

摘要： The invention relates to a method for obtaining images from slices of a specimen, the method comprising:
repeatedly obtaining an image of the surface layer of the specimen (1) and
removing the surface layer of the specimen, thereby bringing the next slice to the surface; characterized in that after at least one of the removals of a surface layer the specimen is exposed to a staining agent.
This method is especially suited for use in a particle-optical instrument equipped with both a scanning electron microscope column ( 20 ) and a focused ion beam column ( 10 ).
The specimen can e.g. be stained in situ by admitting a gas, such as OsO 4 (osmiumtetroxide), to the specimen. This method also makes it possible to perform differential staining by first making an image of the specimen exposed to a first staining agent, and subsequently making an image of the specimen when it is additionally stained by a second staining agent.

摘要翻译： 本发明涉及一种从样本切片获取图像的方法，所述方法包括：重复获得样本（1）的表面层的图像并去除样本的表面层，从而使下一切片到达表面 ; 其特征在于，在将表面层的至少一个清除部分暴露于染色剂之后。 该方法特别适用于装有扫描电子显微镜柱（20）和聚焦离子束柱（10）的粒子光学仪器。 样品可以例如 通过将诸如OsO 4（四氧化锇）的气体引入样品而被原位染色。 该方法还可以通过首先使样品暴露于第一染色剂的图像进行差异染色，并且随后在被第二染色剂另外染色时进行样品的图像。

公开(公告)号：EP1890137B1

公开(公告)日：2011-01-12

申请号：EP07114356.4

申请日：2007-08-15

申请人： FEI COMPANY

发明人： Mulders, Johannes ,  Roussel, Laurent ,  Busing, Wilhelmus

IPC分类号： G01N23/225

CPC分类号： G01N23/225 ,  H01J2237/31745

公开(公告)号：EP1890136A1

公开(公告)日：2008-02-20

申请号：EP06118983.3

申请日：2006-08-16

申请人： FEI COMPANY

发明人： Mulders, Johannes ,  Busing, Wilhelmus ,  Roussel, Laurent

IPC分类号： G01N23/225

CPC分类号： G01N23/225 ,  G01N1/30 ,  H01J2237/31745

摘要： The invention relates to a method for obtaining images from slices of a specimen, the method comprising:
repeatedly obtaining an image of the surface layer of the specimen (1) and
removing the surface layer of the specimen, thereby bringing the next slice to the surface; characterized in that after at least one of the removals of a surface layer the specimen is exposed to a staining agent.
This method is especially suited for use in a particle-optical instrument equipped with both a scanning electron microscope column ( 20 ) and a focused ion beam column ( 10 ).
The specimen can e.g. be stained in situ by admitting a gas, such as OsO 4 (osmiumtetroxide), to the specimen. This method also makes it possible to perform differential staining by first making an image of the specimen exposed to a first staining agent, and subsequently making an image of the specimen when it is additionally stained by a second staining agent.

摘要翻译： 本发明涉及一种从样本切片获取图像的方法，所述方法包括：重复获得样本（1）的表面层的图像并去除样本的表面层，从而使下一切片到达表面 ; 其特征在于，在将表面层的至少一个清除部分暴露于染色剂之后。 该方法特别适用于装有扫描电子显微镜柱（20）和聚焦离子束柱（10）的粒子光学仪器。 样品可以例如 通过将诸如OsO 4（四氧化锇）的气体引入样品而被原位染色。 该方法还可以通过首先使样品暴露于第一染色剂的图像进行差异染色，并且随后在被第二染色剂另外染色时进行样品的图像。