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1.发明公开High angular intensity schottky electron point source 有权PunktförmigeSchottky-Elektronenquelle mit hoherWinkelintensität
公开(公告)号：EP1359599A2
公开(公告)日：2003-11-05
申请号：EP02080322.7
申请日：2002-12-17
申请人： FEI COMPANY
CPC分类号： H01J1/14 , H01J9/04 , H01J37/073 , H01J2237/06316
摘要： An electron emitter is produced by applying a work function lowering material that does not require an extensive heating step before the material will function to lower the work function. By eliminating the extensive heating step, a small radius, highly tapered emitter tip will retain its shape to consistently produce a high angular intensity at a reasonable output power level.
摘要翻译： 通过在材料起作用以降低功函数之前应用不需要大量加热步骤的功函数降低材料来制造电子发射体。 通过消除广泛的加热步骤，小半径，高度锥度的发射极尖端将保持其形状，以在合理的输出功率水平下始终产生高角度强度。
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公开(公告)号：EP1359599B1
公开(公告)日：2010-08-25
申请号：EP02080322.7
申请日：2002-12-17
申请人： FEI COMPANY
CPC分类号： H01J1/14 , H01J9/04 , H01J37/073 , H01J2237/06316
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公开(公告)号：EP1359599A3
公开(公告)日：2007-09-19
申请号：EP02080322.7
申请日：2002-12-17
申请人： FEI COMPANY
CPC分类号： H01J1/14 , H01J9/04 , H01J37/073 , H01J2237/06316
摘要： An electron emitter is produced by applying a work function lowering material that does not require an extensive heating step before the material will function to lower the work function. By eliminating the extensive heating step, a small radius, highly tapered emitter tip will retain its shape to consistently produce a high angular intensity at a reasonable output power level.
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