公开(公告)号：EP2722865A1

公开(公告)日：2014-04-23

申请号：EP12189369.7

申请日：2012-10-22

申请人： FEI COMPANY

发明人： Kieft, Erik ,  Kiewiet, Fred ,  Lassise, Adam ,  Luiten, Otger ,  Mutsaers, Peter ,  Vredenbregt, Edgar ,  Henstra, Alexander

IPC分类号： H01J37/04 ,  H01J37/28

CPC分类号： H01J37/045 ,  H01J37/28 ,  H01J2237/0432

摘要： A charged-particle microscope comprising:
- A charged-particle source, for producing a beam of charged particles that propagates along a particle-optical axis;
- A sample holder, for holding and positioning a sample;
- A charged-particle lens system, for directing said beam onto a sample held on the sample holder;
- A detector, for detecting radiation emanating from the sample as a result of its interaction with the beam;
- A beam pulsing device, for causing the beam to repeatedly switch on and off so as to produce a pulsed beam,

wherein the beam pulsing device comprises a unitary resonant cavity disposed about said particle-optical axis and having an entrance aperture and an exit aperture for the beam, which resonant cavity is embodied to simultaneously produce a first oscillatory deflection of the beam at a first frequency in a first direction and a second oscillatory deflection of the beam at a second, different frequency in a second, different direction. The resonant cavity may have an elongated (e.g. rectangular or elliptical) cross-section, with a long axis parallel to said first direction and a short axis parallel to said second direction.

摘要翻译： 一种带电粒子显微镜，包括： - 带电粒子源，用于产生沿着粒子 - 光轴传播的带电粒子束; - 样品架，用于固定和定位样品; - 带电粒子透镜系统，用于将所述光束引导到保持在样品保持器上的样品上; - 检测器，用于检测由于其与梁的相互作用而从样品发出的辐射; 一种光束脉冲装置，用于使光束反复打开和关闭以产生脉冲光束，其中光束脉冲装置包括围绕所述粒子 - 光轴设置并具有入射孔和出射孔的单一谐振腔 对于所述光束，所述谐振腔被实现为在第一方向上以第一频率同时产生所述光束的第一振荡偏转和所述光束在第二不同方向上的第二不同频率的第二振荡偏转。 谐振腔可以具有细长（例如矩形或椭圆形）横截面，其长轴平行于所述第一方向，短轴与所述第二方向平行。