公开(公告)号：EP0439534A4

公开(公告)日：1993-05-12

申请号：EP89912339

申请日：1989-10-20

申请人： FERRELL, THOMAS L. ,  WARMACK, ROBERT J. ,  REDDICK, ROBIN C.

发明人： FERRELL, THOMAS L ,  WARMACK, ROBERT J. ,  REDDICK, ROBIN C.

IPC分类号： G01B11/30 ,  G01B9/04 ,  G01N21/00 ,  G01Q20/00 ,  G01Q60/18 ,  G02B6/04 ,  G02B6/26 ,  G02B21/00

CPC分类号： G01Q60/22 ,  G01B9/04 ,  G02B6/262 ,  G02B26/103 ,  Y10S977/862

摘要： A method and apparatus for photon scanning tunneling microscopy (10) for examining a sample (20) in a sample area (21) on a surface (16) at a subwavelength resolution is disclosed. The method comprises generating a near-field (18) of photons at a surface (16) containing a sample area (21). The near-field (18) has an area that is larger than the sample area (21), and the near-field (18) has an exponentially increasing intensity in a direction perpendicular to and towards the surface. The near-field (18) is sampled with a probe (26) which receives photons from that near-field (18) that tunnel from the surface (16) to the probe (26). The received photons are detected and a detector (30) produces an output signal that is proportional to the number of photons received by the probe (26). The sample area (21) is scanned with the probe (26) in at least one direction parallel to the surface (16). While scanning, the probe (26) may be maintained either at a position of a constant near-field intensity or at a position of constant distance from the surface (16). A photon scanning tunneling microscope for using the method is also disclosed.