公开(公告)号：EP4299789A1

公开(公告)日：2024-01-03

申请号：EP22759380.3

申请日：2022-02-09

申请人： FUJIFILM Corporation

发明人： YOSHIDA, Akihisa ,  MOCHIZUKI, Yoshihiko

IPC分类号： C23C16/513 ,  H01L21/3065 ,  H05H1/26

摘要： An object of the present invention is to provide a film forming method and an atmospheric plasma film forming apparatus capable of forming a film having high flatness at a high film forming speed by using atmospheric plasma film formation. The object is achieved by introducing plasma generation gas from an inner side flow passage that passes between a pair of electrodes, by introducing raw material gas from at least one of a first outer side flow passage or a second outer side flow passage that pass through an outer side of the pair of electrodes, and by making a gas flow rate between an outlet port of the first outer side flow passage and a substrate and a gas flow rate between an outlet port of the second outer side flow passage and the substrate unequal.

公开(公告)号：EP4039849A1

公开(公告)日：2022-08-10

申请号：EP20870690.3

申请日：2020-09-04

申请人： FUJIFILM Corporation

发明人： MOCHIZUKI, Yoshihiko ,  SEKI, Tomokazu

IPC分类号： C23C16/513 ,  C23C16/455 ,  H01L21/31 ,  H05H1/26

摘要： Provided is a film forming device that deposits, on a substrate, a product generated by decomposing raw material gas by a plasma discharged from a discharge port of a double tube, the device including: an inner tube through which raw material gas containing a film-forming raw material flows and is guided to the discharge port on a downstream side; an outer tube that has the inner tube inserted thereinto and through which plasma-generating gas flows and a plasma generated by discharge is guided to the discharge port on the downstream side; a first electrode that is formed in an annular shape around the outer tube and grounded; and a second electrode that is formed in an annular shape around the outer tube and to which a voltage is applied. The second electrode is disposed on the downstream side with respect to the first electrode, and assuming that a length of the second electrode in an axial direction is L1 and a diameter of the outer tube is D1, a relationship of L1 > D1 is satisfied.