VALVE FOR VACUUM DISCHARGE SYSTEM
    3.
    发明公开
    VALVE FOR VACUUM DISCHARGE SYSTEM 有权
    VENTILFÜRVAKUUMENTLADUNGSSYSTEM

    公开(公告)号:EP1593888A1

    公开(公告)日:2005-11-09

    申请号:EP04709363.8

    申请日:2004-02-09

    IPC分类号: F16K7/12 F16K27/00 F16K51/02

    CPC分类号: F16K7/14 F16K27/003 F16K51/02

    摘要: The present invention provides a valve which makes it possible to reduce the diameter of the vacuum exhaustion pipings for making the facility for the vacuum exhaustion system small, as a result lowering the costs, and making the vacuum exhaustion time short, and also which can prevent the corrosions, cloggings, and seal leakages inside the piping system caused by the accumulation of substances produced by the decomposition of the gas.
    Specifically, the aluminum passivation is applied on the piping parts, i.e. the valve and others, used in the vacuum exhaustion system to inhibit the gas decomposition caused by the temperature rise at the time of the baking so that components for the reduction in the diameter size in the vacuum exhaustion system are provided. The corrosions, cloggings and seat leakages caused by the gas decomposition are prevented.

    摘要翻译: 本发明提供一种能够减小真空排气系统的设备的真空排气管的直径变小的结构,从而降低成本,并使真空耗尽时间缩短,并且也可以防止 由气体分解产生的物质的积聚引起的管道系统内的腐蚀,堵塞和密封泄漏。 具体而言,在真空耗尽系统中使用的管道部件即阀等上施加铝钝化,以抑制由烘烤时的温度升高引起的气体分解,从而使用于还原的部件 在真空排气系统中的直径尺寸。 防止气体分解引起的腐蚀,堵塞和座椅泄漏。