公开(公告)号：EP1475684B1

公开(公告)日：2007-04-04

申请号：EP02781829.3

申请日：2002-11-22

申请人： FUJIKIN INCORPORATED ,  TOKYO ELECTRON LIMITED

发明人： OHMI, Tadahiro ,  UNO, Tomio, Fujikin Incorporated ,  NAKAMURA, Osamu, Fujikin Incorporated ,  IKEDA, Nobukazu, Fujikin Incorporated ,  DOHI, Ryousuke, Fujikin Incorporated ,  NISHINO, Kouji, Fujikin Incorporated ,  MATSUMOTO, Atsushi, Fujikin Incorporated ,  SUGIYAMA, Kazuhiko, Tokyo Electron Ltd. ,  INUI, Shujiro ,  SAKAI, Taiji ,  UEYAMA, Masanori

IPC分类号： G05D7/06 ,  G01F1/36

CPC分类号： G05D7/0635 ,  Y10T137/7759 ,  Y10T137/7761

摘要： An advanced pressure type flow control device capable of accurately controlling a flow by using an experimental flow expression established to accurately fit to the actual flow of compressible fluid in a non-critical area, wherein the experimental flow expression of the compressible fluid in the non-critical area non-sound velocity area is expressed as Qc = KP2m P1 - P2n, and the fluid flow passing through an orifice 4 is calculated by using the expression Qc = KP2m P1 - P2n K is a proportional constant, m and n are constants so that the flow can be accurately and rapidly controlled to a specified one, and a pressure ratio P2/P1 = r provided by an upstream side pressure P1 and a downstream side pressure P2 is always compared with a critical value rc and the flow is calculated by using an expression Qc = KP1 under the critical condition of r rc so that the flow can be accurately and rapidly controlled to the specified one in correspondence to all conditions of the fluid.

公开(公告)号：EP1475684A1

公开(公告)日：2004-11-10

申请号：EP02781829.3

申请日：2002-11-22

申请人： Fujikin Incorporated ,  TOKYO ELECTRON LIMITED

发明人： OHMI, Tadahiro ,  UNO, Tomio, Fujikin Incorporated ,  NAKAMURA, Osamu, Fujikin Incorporated ,  IKEDA, Nobukazu, Fujikin Incorporated ,  DOHI, Ryousuke, Fujikin Incorporated ,  NISHINO, Kouji, Fujikin Incorporated ,  MATSUMOTO, Atsushi, Fujikin Incorporated ,  SUGIYAMA, Kazuhiko, Tokyo Electron Ltd. ,  INUI, Shujiro ,  SAKAI, Taiji ,  UEYAMA, Masanori

IPC分类号： G05D7/06

CPC分类号： G05D7/0635 ,  Y10T137/7759 ,  Y10T137/7761

摘要： Provided is an improved pressure-type flow rate control apparatus that can control the flow rate of a fluid with great precision using an empirical formula. The empirical formula can provide values that closely fit with the actual flow rates of a compressible fluid under non-critical conditions.
The improved pressure-type flow rate control apparatus can control the flow rate of fluid passing through an orifice 4 to a target flow rate with accuracy and at a high speed. The empirical formula for the compressible fluid under non-critical conditions (sub-sonic) is expressed as Qc = KP 2 m (P 1 - P 2 ) n and the flow rate of fluid passing through orifice 4 is calculated by: Qc = KP 2 ​ m (P 1 - P 2 ) n    (K is a proportional constant; and m and n are constants)
   so that the flow rate of fluid passing through the orifice 4 can be controlled to the target flow rate with high precision at a high speed.
Also provided is an improved pressure-type flow rate control apparatus in which a pressure ratio P 2 /P 1 = r, obtained from an upstream pressure P 1 and a downstream pressure P 2 is constantly compared with a critical value rc, and under critical conditions (r ≤ r c ), the flow rate is calculated by : Qc = KP 1 . Under non-critical conditions (r > r c ), the flow rate is calculated by Qc = KP 2 m (P 1 - P 2 ) n , so that the flow rate is controlled to the target flow rate with accuracy at a high speed depending upon the conditions of fluid.

摘要翻译： 提供了一种改进的压力式流量控制装置，其可以使用经验公式以高精度控制流体的流量。 经验公式可以提供与非关键条件下可压缩流体的实际流量密切配合的值。 改进的压力型流量控制装置可以精确地和高速地将通过孔口4的流体的流量控制到目标流量。 在非临界条件（亚声）下的可压缩流体的经验公式表示为Qc = KP2（P1-P2），通过孔口4的流体的流量通过以下公式计算： Qc = KP2（P1-P2）（K是比例常数，m和n是常数），使得通过孔4的流体的流量可以被控制到 目标流速高精度高速。 还提供了一种改进的压力式流量控制装置，其中从上游压力P1和下游压力P2获得的压力比P2 / P1 = r与临界值rc不断相关，并且在临界值 条件（r≤rc），流量通过下式计算： Qc = KP1。 在非临界条件（r> rc）下，通过Qc = KP2（P1-P2）计算流量，使流量精确控制到目标流量 根据流体的条件高速运转。