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1.发明公开ORIFICE FOR PRESSURE TYPE FLOW RATE CONTROL UNIT AND PROCESS FOR MANUFACTURING ORIFICE 有权DÜSEEINES DURCHFLUSSREGLERS MIT EINER DRUCKREGELUNG UND DEREN HERSTELLUNGSVERFAHREN
公开(公告)号：EP0931941A1
公开(公告)日：1999-07-28
申请号：EP98937820.3
申请日：1998-08-13
发明人： OHMI, Tadahiro , KAGAZUME, Tetu-Tokyo Electron Yamanashi Ltd. , SUGIYAMA, Kazuhiko-Tokyo Electron Yamanashi Ltd. , FUKADA, Osamu-Kabushiki-Kaisha Fujikin , OZAWA, Susumu-Kabushiki-Kaisha Fujikin , SATOU, Yoshihiro-Kabushiki-Kaisha Fujikin , DOHI, Ryousuke-Kabushiki-Kaisha Fujikin , UNO, Tomio-Kabushiki-Kaisha Fujikin , NISHINO, Kouji-Kabushiki-Kaisha Fujikin , FUKUDA, Hiroyuki-Kabushiki-Kaisha Fujikin , IKEDA, Nobukazu-Kabushiki-Kaisha Fujikin , YAMAJI, Michio-Kabushiki-Kaisha Fujikin
CPC分类号： G01F1/40 , G05D7/0186
摘要： An orifice for use in pressure type flow rate control unit which can be manufactured easily and inexpensively, and which has a linear relationship between pressure P 1 upstream of the orifice and the flow rate over a wide range of pressure ratio P 2 /P 1 (where P 1 is the pressure upstream of the orifice and P 2 is the pressure downstream of same), with the flow rate characteristic relationship among a plurality of orifices being easily adjustable. More specifically, the orifice has a structure comprising a tapered inlet section (1) wherein one open end of a bottom hole (6) bored into a main body member (D) is cut into a shape like the mouthpiece of a trumpet, and a short drawn parallel part (2) continuing therefrom; and a short expanded tapered section (3) formed by expanding the diameter of the other open end of the bottom hole (6) and continuing from the drawn parallel part (2), and an expanded parallel part (4) continuing therefrom.
摘要翻译： 用于压力式流量控制单元的孔口，其可以容易且廉价地制造，并且在孔口上游的压力P1和压力比P2 / P1的宽范围（P1为P1）之间具有线性关系 孔口上游的压力和P2是其下游的压力），多个孔口之间的流量特性关系容易调节。 更具体地，孔口具有包括锥形入口部分（1）的结构，其中钻入主体部件（D）中的底部孔（6）的一个开口端被切割成类似于喇叭口部的形状，并且 短延伸平行部分（2）; 以及通过使所述底孔（6）的另一开口端的直径扩大并从所述拉伸平行部分（2）延伸而形成的短的膨胀锥形部分（3）以及从其延伸的扩展的平行部分（4）。
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2.发明授权ORIFICE FOR PRESSURE TYPE FLOW RATE CONTROL UNIT AND PROCESS FOR MANUFACTURING ORIFICE 有权流量控制器与压力控制及其制造方法NOZZLE
公开(公告)号：EP0931941B1
公开(公告)日：2005-12-28
申请号：EP98937820.3
申请日：1998-08-13
发明人： OHMI, Tadahiro , KAGAZUME, Tetu-Tokyo Electron Yamanashi Ltd. , SUGIYAMA, Kazuhiko-Tokyo Electron Yamanashi Ltd. , FUKADA, Osamu-Kabushiki-Kaisha Fujikin , OZAWA, Susumu-Kabushiki-Kaisha Fujikin , SATOU, Yoshihiro-Kabushiki-Kaisha Fujikin , DOHI, Ryousuke-Kabushiki-Kaisha Fujikin , UNO, Tomio-Kabushiki-Kaisha Fujikin , NISHINO, Kouji-Kabushiki-Kaisha Fujikin , FUKUDA, Hiroyuki-Kabushiki-Kaisha Fujikin , IKEDA, Nobukazu-Kabushiki-Kaisha Fujikin , YAMAJI, Michio-Kabushiki-Kaisha Fujikin
CPC分类号： G01F1/40 , G05D7/0186
摘要： An orifice for use in pressure type flow rate control unit which can be manufactured easily and inexpensively, and which has a linear relationship between pressure P1 upstream of the orifice and the flow rate over a wide range of pressure ratio P2/P1 (where P1 is the pressure upstream of the orifice and P2 is the pressure downstream of same), with the flow rate characteristic relationship among a plurality of orifices being easily adjustable. More specifically, the orifice has a structure comprising a tapered inlet section (1) wherein one open end of a bottom hole (6) bored into a main body member (D) is cut into a shape like the mouthpiece of a trumpet, and a short drawn parallel part (2) continuing therefrom; and a short expanded tapered section (3) formed by expanding the diameter of the other open end of the bottom hole (6) and continuing from the drawn parallel part (2), and an expanded parallel part (4) continuing therefrom.
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